Flip Chip Interconnection Structure

ABSTRACT

A flip chip interconnection structure is formed by mechanically interlocking joining surfaces of a first and second element. The first element, which may be a bump on an integrated circuit chip, includes a soft, deformable material with a low yield strength and high elongation to failure. The surface of the second element, which may for example be a substrate pad, is provided with asperities into which the first element deforms plastically under pressure to form the mechanical interlock.

CLAIM OF DOMESTIC PRIORITY

The present application is a continuation of U.S. patent application Ser. No. 13/175,694, filed Jul. 1, 2011, which is a continuation of U.S. patent application Ser. No. 10/849,947, now U.S. Pat. No. 7,994,636, filed May 20, 2004, which is a division of U.S. patent application Ser. No. 09/802,664, now U.S. Pat. No. 6,815,252, filed Mar. 9, 2001, which claims the benefit of U.S. Provisional Application No. 60/188,570, filed Mar. 10, 2000, all of which applications are incorporated herein by reference.

FIELD OF THE INVENTION

This invention relates to flip chip interconnection structures and, more particularly, to an interconnect structure formed by mechanical deformation and interlocking of asperities between the surfaces to be joined.

BACKGROUND OF THE INVENTION

Flip chip interconnection between an integrated circuit (IC) chip and a substrate is commonly performed in electronic package assembly. In the most common form of such interconnection bumps on the IC chip are metallurgically joined to pads formed on the substrate, usually by melting of the bump material. While this approach provides robust connections, it is difficult to reduce the pitch of the interconnection due to the risk of bridging (i.e., shorting between adjacent connections) during the melting and solidification processes. In an alternative approach the attachment is made using a particulate film or paste, whereby conductive particles in the paste or film together with the shrinkage force of a resin effect an electrical connection. This approach lends itself to reduction of interconnection pitch but suffers from limited long term reliability owing to the susceptibility of the particulate interconnection to degrade over time.

SUMMARY OF THE INVENTION

In one general aspect the invention features a method of making a semiconductor device comprising the steps of providing a semiconductor die, forming an interconnect structure over the semiconductor die, providing a substrate including an interconnect pad, and bonding the interconnect structure over the semiconductor die and interconnect pad by deforming the interconnect structure around the interconnect pad.

In another embodiment, the present invention is a method of making a semiconductor device comprising the steps of providing a semiconductor die, providing a substrate including an interconnect pad, and forming an interconnect structure over the semiconductor die and around the interconnect pad.

In another embodiment, the present invention is a semiconductor device comprising a semiconductor die and an interconnect structure formed over the semiconductor die. A substrate includes an interconnect pad. The interconnect structure is deformed onto the interconnect pad.

In another embodiment, the present invention is a semiconductor device comprising a substrate and an interconnect pad formed over the substrate. An interconnect structure is deformed over the interconnect pad.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A, 1B are diagrammatic sketches in a sectional view showing an illustrative embodiment according to the invention of steps in the formation of an assembly having a chip interconnection structure according to the invention;

FIGS. 2A, 2B are diagrammatic sketches in a sectional view showing a second illustrative embodiment according to the invention of steps in the formation of an assembly having a chip interconnection structure according to the invention;

FIGS. 3A, 3B are diagrammatic sketches in a sectional view showing a third illustrative embodiment according to the invention of steps in the formation of an assembly having a chip interconnection structure according to the invention;

FIGS. 4A, 4B are diagrammatic sketches in a sectional view showing a fourth illustrative embodiment according to the invention steps in the formation of an assembly having a chip interconnection structure according to the invention;

FIG. 5 is a diagrammatic sketch in a sectional view showing an alternative shape for an interconnection bump useful according to the invention; and

FIG. 6 is a diagrammatic sketch in a sectional view showing another alternative shape for an interconnection bump useful according to the invention.

DETAILED DESCRIPTION OF THE DRAWINGS

With reference to FIGS. 1A, 1B a flip chip interconnection structure generally designated 10 is shown schematically including a first member 12 and a second member 14. The first member 12 is preferably a bump formed on the IC chip and the second member 14 is preferably a lead or pad formed on the substrate. The first member 12 further preferably comprises a soft, deformable material with a low yield strength and high elongation to failure. The second member 14 further preferably includes a substrate pad with a conventional plated surface finish, and is characterized by having asperities 16, which are shown exaggerated in the Figs. for purposes of illustration. The scale of the asperities is generally in the order about 1 μm-25 μm. The bump is a generally compliant material, that is to say, a material that, in the particular bump as shaped, undergoes a plastic deformation greater than about 25 μm under a force equivalent to a vertical load of about 250 grams. Gold can be a particularly useful material for the bumps according to the invention.

The interconnection is accomplished by compressing the first member 12 and the second member 14 against one another to cause plastic flow of first member 12 into asperities 16. The height and soft nature of first member 12 allows considerable deformation to occur even after the connection is effected thus allowing for other bump/pad pairs with poor planarity to be joined with equal success. The force and temperature requirements necessary to effect the interconnection are significantly lower than needed for conventional thermo-compression bonds that require metallurgical diffusion of the mating materials. These reduced requirements greatly reduce damage that might otherwise occur on the chip, particularly when the number of connections to be effected simultaneously is large.

A second embodiment is schematically shown in FIGS. 2A, 2B. A macroscopic interlocking configuration generally designated 20 is formed by plastic flow of the material of first member 22 around a side wall 24 and edge 26 of a second member or trace 28. Preferably the flow of the material of first member 22 is around the side wall 24 and does not cause material flow into a region between adjacent traces but rather in the normal direction within the same plane. The interlocking configuration 20 provides for an increased area of interlocked surfaces without significantly increasing the bonding force, thereby providing a more robust connection. Further the additional displacement perpendicular to the chip surface provides greater tolerance to poor co-planarity of multiple mating surface. Finally, the interlocking along a plane perpendicular to the chip surface in addition to the usual interlocking parallel to the chip surface provides for protection against relative movement between the die and the substrate in a perpendicular direction.

A third embodiment is shown in FIGS. 3A, 3B and includes an interconnection generally designated 30. The interconnection 30 is formed by plastic flow of the material of a first member 32 around a second member 34. The second member 34 includes a smaller width than that of the first member 32 which allows for plastic flow of the material of first member 32 around both sides 36 and 38 of the second member 34.

A fourth embodiment is shown in FIGS. 4A, 4B and includes an interconnection generally designated 40. The lead geometry of a second element 42 is shown to be wedge shaped to take advantage of what represents the most typical “undercut” lead shape in actual substrates that are fabricated by the subtractive etching method. The interconnection 40 is formed by plastic flow of the material of a first element 44 around the second element 42. The shown geometry removes the restriction of minimum trace width and more specifically the minimum width of a plateau 46 necessary for conventional wire bonding applications. It is contemplated that the interconnection 40 could alternatively be formed by bonding directly on a via pad or through a via hole down to the next lower layer on the substrate.

In embodiments as described above with reference to FIGS. 2A, 2B, 3A, 3B, 4A, 4B, the macroscopic interlocking configuration allows for formation of the interconnect using a lower force, for example lower by a factor of 2, as compared with embodiments as described above with reference to FIGS. 1A, 1B. Use of lower force of compression can result in less damage to chips during processing.

In preferred embodiments, an adhesive resin is preferably applied in a space between the chip and the substrate such that the compressive force supplied by the cured resin further improves the long-term retention of the electrical connection. The adhesive resin is preferably applied before the mating surfaces are bonded, and is cured concomitantly with the formation of the interconnection. The applied interconnection force helps displace the resin material away from the mating surfaces to allow the formation of the desired mechanically interlocked connection. Alternatively, the resin can be applied after the interconnection using an underfill process.

In the disclosed preferred embodiments, the material of the first members 12, 22, 32 and 44 is preferably Cu, electroless NiAu or Au. The substrate material is preferably single-sided FR5 laminate or 2-sided BT-resin laminate.

The bumps may have various configurations other than one shown in the Figs. above having a generally rectangular section before compression and deformation; two particularly useful ones are shown diagrammatically in FIGS. 5 and 6. FIG. 5 shows a “stepped” shape, in which the portion of the bump adjacent the chip (the “base”) is wider than the portion (the “tip”) that will be compressed against the pad on the substrate. FIG. 6 shows a “stud bump” configuration, in which the base has a peripherally rounded profile that is wider than the tip. Either of these constructs can provide improved compliance of the bump with the asperities on the substrate, owing to the thinner tip dimension, and also provide good structural stability owing to the wider profile of the base.

The second member may be a lead or a pad, as described above, and a bump may be interconnected to a conventional solder pad that is electrically connect to a via hole; but in some embodiments the second member itself includes a via hole. According to this embodiment of the invention an interconnection structure can be formed directly between the bump and the via hole, by compressing the bump directly against conductive material in and at the margin of the via hole, rather than compressing the bump onto a pad, such as a solder pad, formed at some distance away from the via hole and connected to it. This results in a more efficient use of the area on the chip. Where the opening in the via hole is generally smaller than the tip of the bump, then the bump can be pressed directly onto the via hole, and becomes deformed into the via hole to form the interconnection; in effect, the via hole works as the asperity in this construct where the bump is smaller than the via hole, then the bump can be offset, so that the bond is formed at a portion of the rim of the via opening. 

What is claimed:
 1. A method of making a semiconductor device, comprising: providing a semiconductor die; forming an interconnect structure over the semiconductor die; providing a substrate including an interconnect pad; and bonding the interconnect structure over the semiconductor die and interconnect pad by deforming the interconnect structure around the interconnect pad.
 2. The method of claim 1, further including maintaining a vertical separation between the semiconductor die and substrate.
 3. The method of claim 1, further including deforming the interconnect structure to reduce relative movement between the semiconductor die and substrate.
 4. The method of claim 1, further including deforming the interconnect structure about 25 micrometers.
 5. The method of claim 1, further including forming a width of the interconnect pads to be less than a width of the interconnect structure.
 6. The method of claim 1, further including depositing an adhesive resin between the semiconductor die and substrate.
 7. A method of making a semiconductor device, comprising: providing a semiconductor die; providing a substrate including an interconnect pad; and forming an interconnect structure over the semiconductor die and around the interconnect pad.
 8. The method of claim 7, further including maintaining a vertical separation between the semiconductor die and substrate.
 9. The method of claim 7, further including deforming the interconnect structure into a surface of the interconnect pad to reduce relative movement between the semiconductor die and substrate.
 10. The method of claim 7, wherein the interconnect structure includes gold, copper, or nickel.
 11. The method of claim 7, further including deforming the interconnect structure about 25 micrometers.
 12. The method of claim 7, further including forming a width of the interconnect pad to be less than a width of the interconnect structure.
 13. The method of claim 7, further including depositing an adhesive resin between the semiconductor die and substrate.
 14. A semiconductor device, comprising: a semiconductor die; an interconnect structure formed over the semiconductor die; and a substrate including an interconnect pad, the interconnect structure deformed onto the interconnect pad.
 15. The semiconductor device of claim 14, further including a vertical separation maintained between the semiconductor die and substrate.
 16. The semiconductor device of claim 14, wherein the interconnect structure is deformed about 25 micrometers.
 17. The semiconductor device of claim 14, wherein the deformation of the interconnect structure occurs along a sidewall of the interconnect structure.
 18. The semiconductor device of claim 14, wherein the interconnect structure includes gold, copper, or nickel.
 19. The semiconductor device of claim 14, wherein a width of the interconnect pad is less than a width of the interconnect structure.
 20. A semiconductor device, comprising: a substrate; an interconnect pad formed over the substrate; and an interconnect structure deformed over the interconnect pad.
 21. The semiconductor device of claim 20, further including: a semiconductor die disposed over the substrate; and a vertical separation maintained between the semiconductor die and substrate.
 22. The semiconductor device of claim 20, wherein the interconnect structure is deformed about 25 micrometers.
 23. The semiconductor device of claim 20, wherein the deformation of the interconnect structure occurs along a sidewall of the interconnect structure.
 24. The semiconductor device of claim 20, wherein the interconnect structure includes gold, copper, or nickel.
 25. The semiconductor device of claim 20, wherein a width of the interconnect pad is less than a width of the interconnect structure. 